About LINTEC

A pioneer in fluid control technology

LINTEC is a Japanese company aiming to revolutionize the semiconductor industry by developing gas and liquid flow control, vaporization, and heat exchange technology.

Click

LINTEC was founded in 1987 as a semiconductor industry-oriented gas mass flow controller manufacturing firm.

ガスマスフローコントローラMC-5000C

LINTEC pioneered the liquid vapor delivery tech by being the first company in the world

液体マスフローメーターMC-3000L

to develop a liquid mass flow controller for TEOS flow rate control and a vaporization system for precisely controlled TEOS flow rate.

気化器VU-430

LINTEC also offers high-efficiency compact heat exchangers

ガス加熱器HX-0051

as well as cabinets that integrate our products based on the needs of the customer.

MFC/気化供給装置

“One-of-a-kind” fluid control technology

LINTEC was the first company to develop a liquid mass flow controller,
and still continues to develop original, “one-of-a-kind” technology.

Flow control technology


MFC/MFM

  • MFC for O3 flow control
  • 0.2sec fast response MFC
  • MFC for liquids
Liquid vaporization technology


Vaporizer

  • High efficiency vaporizer
  • Quartz vaporizer
  • High flow rate vaporizer
  • Non-carrier gas vaporizer
Heat exchange technology

ガス加熱器HX-0051H
Heat exchanger

  • Compact heat exchanger
  • High flow rate heat exchanger
  • High temperature heat exchanger

LINTEC Quality Policy

We deliver exceptional service and high-quality products
to ensure that our customers’ expectations are fully met.

ISO 9001